Title
Advances in quantitative nanoscale subsurface imaging by mode-synthesizing atomic force microscopy
Abbreviated Journal Title
Appl. Phys. Lett.
Keywords
ULTRASONIC FREQUENCIES; HOLOGRAPHY; NANOPARTICLES; CANTILEVERS; Physics, Applied
Abstract
This paper reports on advances toward quantitative non-destructive nanoscale subsurface investigation of a nanofabricated sample based on mode synthesizing atomic force microscopy with heterodyne detection, addressing the need to correlate the role of actuation frequencies of the probe f(p) and the sample f(s) with depth resolution for 3D tomography reconstruction. Here, by developing a simple model and validating the approach experimentally through the study of the nanofabricated calibration depth samples consisting of buried metallic patterns, we demonstrate avenues for quantitative nanoscale subsurface imaging. Our findings enable the reconstruction of the sample depth profile and allow high fidelity resolution of the buried nanostructures. Non-destructive quantitative nanoscale subsurface imaging offers great promise in the study of the structures and properties of complex systems at the nanoscale.
Journal Title
Applied Physics Letters
Volume
105
Issue/Number
5
Publication Date
1-1-2014
Document Type
Article
DOI Link
Language
English
First Page
5
WOS Identifier
ISSN
0003-6951
Recommended Citation
Vitry, P.; Bourillot, E.; Plassard, C.; Lacroute, Y.; Tetard, L.; and Lesniewska, E., "Advances in quantitative nanoscale subsurface imaging by mode-synthesizing atomic force microscopy" (2014). Faculty Bibliography 2010s. 6235.
https://stars.library.ucf.edu/facultybib2010/6235
Comments
Authors: contact us about adding a copy of your work at STARS@ucf.edu
"This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in the linked citation and may be found originally at Applied Physics Letters."