Effect of Pyrolysis Temperature on the Structure and Conduction of Polymer-Derived SiC

    Authors

    K. W. Wang; B. S. Ma; X. Q. Li; Y. G. Wang;L. N. An

    Comments

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    Abbreviated Journal Title

    J. Am. Ceram. Soc.

    Keywords

    AMORPHOUS-CARBON; SILICON OXYCARBIDES; CERAMICS; SPECTRA; FILMS; PIEZORESISTIVITY; SPECTROSCOPY; STRESS; SP(3); MEMS; Materials Science, Ceramics

    Abstract

    We studied the electric conductivity and structure of polymer-derived carbon-rich amorphous SiC pyrolyzed at different temperatures. The conductivity of the material increased drastically with pyrolysis temperature followed an Arrhenius relationship with the activation energy of similar to 3.4 eV. Raman and X-ray photoelectron spectroscopy analysis revealed that the order of free carbon phase increased with pyrolysis temperature, accompanied by sp(3)- > sp(2) transition. The activation energy for such a structure change was 3.1-3.8 eV, which is close to that for the conductivity change. We thus believe that the increase in the conductivity was mainly due to the increase in conductivity of the free carbon phase.

    Journal Title

    Journal of the American Ceramic Society

    Volume

    97

    Issue/Number

    7

    Publication Date

    1-1-2014

    Document Type

    Article

    Language

    English

    First Page

    2135

    Last Page

    2138

    WOS Identifier

    WOS:000338126800023

    ISSN

    0002-7820

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