Temperature sensor made of polymer-derived ceramics for high-temperature applications

    Authors

    R. Zhao; G. Shao; Y. J. Cao; L. N. An;C. Y. Xu

    Comments

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    Abbreviated Journal Title

    Sens. Actuator A-Phys.

    Keywords

    High-temperature sensor; Temperature measurement; Polymer-derived; ceramic; Turbine engine; AMORPHOUS-SILICON CARBONITRIDE; SIALCN CERAMICS; SILICOALUMINUM; CARBONITRIDE; WATER-VAPOR; SICN MEMS; DEGREES-C; FABRICATION; OXIDATION; CARBIDE; OXIDATION/CORROSION; Engineering, Electrical & Electronic; Instruments & Instrumentation

    Abstract

    This paper describes the use of polymer-derived SiAlCN (silicoaluminum carbonitride) ceramics (PDC) to fabricate a temperature sensor for high-temperature applications. A unique sensor head was designed and fabricated with Pt wires seamlessly embedded in as electrodes. Material characterization test demonstrates that the resistance of the senor head decreases monotonically with surrounding temperature, suggesting its readiness to be used for temperature measurement. In actual experiment (temperature up to 830 degrees C), the measurement of the PDC sensor demonstrates good repeatability to both unidirectional and bidirectional temperature variations for the total span of 10 h, and its measurement follows closely with the thermal couple measurement. These results demonstrated that the temperature sensors made of polymer-derived ceramics (PDC) have excellent accuracy and repeatability, and can be used in high temperature environment. (C) 2014 The Authors. Published by Elsevier B.V.

    Journal Title

    Sensors and Actuators a-Physical

    Volume

    219

    Publication Date

    1-1-2014

    Document Type

    Article

    Language

    English

    First Page

    58

    Last Page

    64

    WOS Identifier

    WOS:000343354700008

    ISSN

    0924-4247

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