High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates

    Authors

    Y. Zou; D. N. Zhang; H. T. Lin; L. Li; L. Moreel; J. Zhou; Q. Y. Du; O. Ogbuu; S. Danto; J. D. Musgraves; K. Richardson; K. D. Dobson; R. Birkmire;J. J. Hu

    Comments

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    Abbreviated Journal Title

    Adv. Opt. Mater.

    Keywords

    ROLL-TO-ROLL; GE-SB-S; WAVE-GUIDES; NANOIMPRINT LITHOGRAPHY; IMPRINT; LITHOGRAPHY; PHOTOTHERMAL SPECTROSCOPY; ROUGHNESS REDUCTION; SIDEWALL; ROUGHNESS; OPTICAL-PROPERTIES; SOFT-LITHOGRAPHY; Materials Science, Multidisciplinary; Optics

    Abstract

    This paper reports a versatile technique for the fabrication of high-index-contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low-temperature chalcogenide glass film deposition and resist-free single-step thermal nanoimprint to process low-loss, sub-micron single-mode waveguides with a smooth surface finish using simple contact photolithography. Using this approach, the first chalcogenide glass microring resonators are fabricated by thermal nanoimprinting. The devices exhibit an ultra-high quality factor of 4 x 10 5 near 1550 nm wavelengths, which represents the highest value reported in chalcogenide glass microring resonators. Furthermore, sub-micrometer nanoimprinting of chalcogenide glass films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for the monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates.

    Journal Title

    Advanced Optical Materials

    Volume

    2

    Issue/Number

    5

    Publication Date

    1-1-2014

    Document Type

    Article

    Language

    English

    First Page

    478

    Last Page

    486

    WOS Identifier

    WOS:000336061200010

    ISSN

    2195-1071

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