High-Performance, High-Index-Contrast Chalcogenide Glass Photonics on Silicon and Unconventional Non-planar Substrates

    Authors

    Y. Zou; D. N. Zhang; H. T. Lin; L. Li; L. Moreel; J. Zhou; Q. Y. Du; O. Ogbuu; S. Danto; J. D. Musgraves; K. Richardson; K. D. Dobson; R. Birkmire;J. J. Hu

    Comments

    Authors: contact us about adding a copy of your work at [email protected]

    Abbreviated Journal Title

    Adv. Opt. Mater.

    Keywords

    ROLL-TO-ROLL; GE-SB-S; WAVE-GUIDES; NANOIMPRINT LITHOGRAPHY; IMPRINT; LITHOGRAPHY; PHOTOTHERMAL SPECTROSCOPY; ROUGHNESS REDUCTION; SIDEWALL; ROUGHNESS; OPTICAL-PROPERTIES; SOFT-LITHOGRAPHY; Materials Science, Multidisciplinary; Optics

    Abstract

    This paper reports a versatile technique for the fabrication of high-index-contrast photonic structures on both silicon and plastic substrates. The fabrication technique combines low-temperature chalcogenide glass film deposition and resist-free single-step thermal nanoimprint to process low-loss, sub-micron single-mode waveguides with a smooth surface finish using simple contact photolithography. Using this approach, the first chalcogenide glass microring resonators are fabricated by thermal nanoimprinting. The devices exhibit an ultra-high quality factor of 4 x 10 5 near 1550 nm wavelengths, which represents the highest value reported in chalcogenide glass microring resonators. Furthermore, sub-micrometer nanoimprinting of chalcogenide glass films on non-planar plastic substrates is demonstrated, which establishes the method as a facile route for the monolithic fabrication of high-index-contrast devices on a wide array of unconventional substrates.

    Journal Title

    Advanced Optical Materials

    Volume

    2

    Issue/Number

    5

    Publication Date

    1-1-2014

    Document Type

    Article

    Language

    English

    First Page

    478

    Last Page

    486

    WOS Identifier

    WOS:000336061200010

    ISSN

    2195-1071

    Share

    COinS
     

    Accessibility Statement

    This item was created or digitized prior to April 24, 2027, or is a reproduction of legacy media created before that date. It is preserved in its original, unmodified state specifically for research, reference, or historical recordkeeping. In accordance with the ADA Title II Final Rule, the University Libraries provides accessible versions of archival materials upon request. To request an accommodation for this item, please submit an accessibility request form.