Liquid crystal droplet array for non-contact electro-optic inspections

    Authors

    H. Ren; H. Q. Xianyu;S. T. Wu

    Comments

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    Abbreviated Journal Title

    J. Phys. D-Appl. Phys.

    Keywords

    DEFECT INSPECTION; Physics, Applied

    Abstract

    We report a high density liquid crystal (LC) droplet array for non-contact inspection. The incident light is modulated by changing the shape of each droplet using a dielectric force even though the electrode and droplet array are separated by a fairly large air gap. The reshaped LC droplets cause colour change which is easily inspected by the human eye. In a sample with 30 mu m thick polymer cavity and 130 mu m air gap, LC droplet surface reshaping is clearly observed as the applied voltage exceeds 40 V(rms). Potential application of such a LC droplet array for inspecting the defected thin-film-transistor pixels is emphasized.

    Journal Title

    Journal of Physics D-Applied Physics

    Volume

    43

    Issue/Number

    36

    Publication Date

    1-1-2010

    Document Type

    Article

    Language

    English

    First Page

    5

    WOS Identifier

    WOS:000281254300006

    ISSN

    0022-3727

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