High Throughput, Low Toxic Processing of Very Thin, High Efficiency CIGSSs Solar Cells, Year 3, Quarter 3 Report
Report Number
FSEC-CR-1748-08
Keywords
PV Thin-Films; PV Cells; CIGSSs solar cells; Silicon nitride deposition; RF magnetron sputtering; Sodium diffusion barrier; Solar cell fabrication
Abstract
SixNy/Mo depositions were carried out on glass samples. SixNy layer is required as diffusion barrier layer to prevent sodium diffusion from sodalime glass to CuInxGa1-xSe2-ySy (CIGSeS) layer. SixNy films were deposited by reactive RF magnetron sputtering from silicon target in the presence of nitrogen. Silicon target was bonded to the target backing plate and allowed the adhesive to cure for > 24 hours. Afterwards the silicon target was mounted in place of CuGa target in the CuGa/In/Mo DC magnetron sputtering chamber. The RF tuning network was shifted from ZnO/ZnO:Al bilayer RF magnetron sputtering chamber to sputtering source having newly mounted silicon target. Gas line connection for nitrogen including mass flow controller, and control unit were made.
Date Published
3-3-2008
Identifiers
421
Subjects
Solar cells; Thin films; Silicon compounds; Glass
Local Subjects
PV Cells; PV Thin-Films
Collection
FSEC Energy Research Center® Collection
STARS Citation
Florida Solar Energy Center and Dhere, Neelkanth, "High Throughput, Low Toxic Processing of Very Thin, High Efficiency CIGSSs Solar Cells, Year 3, Quarter 3 Report" (2008). FSEC Energy Research Center®. 421.
https://stars.library.ucf.edu/fsec/421