Study of a high-performance micropump : numerical analysis of flow and structural elements


Abstract The design and development of microfluidic devices is a burgeoning new field of research. Micropumps represent the largest subsidiary within this field of investigation due-to the essential role pumps play in so many mechanical systems. The work presented here documents the study of the fluid and structural aspects of a higlt-performance micropump. The application of the micropump will be its incorporation into a liquid spray cooling system for transistor and microprocessor chips. The analysis begins with an introduction to the MEMS field and a discussion on the motivation and the conceptual application of the micropump. A review of current actuation and valve structure configurations is presented, which leads to the articulation of key design decisions. Numerical models are then developed in order to determine the forces created by the selected actuation techniques and to predict the resulting structural responses within the pump body. An analysis of valve actuation is conducted in similar fashion. The finite element method is applied to diaphragm and valve geometries to refine behaviOl'al predictions. This is followed by a discussion on the computational fluid dynamic analysis conducted on several variations of micropump designs. The CFD process is used in an iterative fashion until a pump configuration, which meets the performance req uirements established earlier on, is arrived at. The thesis then concludes with a review of microstereolithography, the fabrication process by which the micropump will be made.


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Thesis Completion





Kapat, Jayanta


Bachelor of Science (B.S.)


College of Engineering

Degree Program

Mechanical Engineering


Dissertations, Academic -- Engineering;Engineering -- Dissertations, Academic;Microelectromechanical systems -- Design and construction







Access Status

Open Access

Length of Campus-only Access


Document Type

Honors in the Major Thesis

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