Abstract
Methods, systems and apparatus for producing a variable, known number of nanoparticles of various materials in an expanding mist in a vacuum or enclosure. The configurations allow for this mist of small particles to be produced in bursts, at repetition rates over a wide range of frequencies. The technique produces an isotropically expanding mist of particles. Direct applications of the invention can be used for the development of high power short wavelength incoherent light sources for applications in EUV lithography (EUVL), advanced microscopy, precision metrology, and other fields.
Document Type
Patent
Patent Number
US 8,025,837
Application Serial Number
11/986,057
Issue Date
9-27-2011
Current Assignee
UCFRF
Assignee at Issuance
UCFRF
College
College of Optics and Photonics
Department
CREOL
Allowance Date
5-26-2011
Filing Date
11-20-2007
Assignee at Filing
UCFRF
Filing Type
Nonprovisional Application Record
Donated
no
Recommended Citation
Richardson, Martin; Koay, Chiew-Seng; and Takenoshita, Kazutoshi, "Generator for Flux Specific Bursts of Nano-Particles" (2011). UCF Patents. 209.
https://stars.library.ucf.edu/patents/209