Abstract

Collector optics for an EUV radiation source for collecting EUV radiation. The collector optics includes an elliptical dish reflector where light generated at a focal point of the reflector and is directed to a collection location. A frustal annual reflector is positioned around an outer edge of the dish reflector to collect more of the EUV radiation that may otherwise be lost. The radiation reflected by the annual reflector is directed to a center axicon reflector positioned between the focal point of the dish reflector and the collection location to redirect the radiation reflected by the annual reflector to be within a predetermined collection angle.

Document Type

Patent

Patent Number

US 7,075,713

Application Serial Number

10/429,413

Issue Date

7-11-2006

Current Assignee

UCFRF

Assignee at Issuance

UCFRF

Allowance Date

4-10-2006

Filing Date

5-5-2003

Assignee at Filing

Agency: Northrop Grumman Corporation

Filing Type

Nonprovisional Application Record

Donated

yes

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