Abstract

A collector optic assembly for a EUV radiation source. The collector optic assembly includes an elliptical meniscus having a reflective Si/Mo coating for collecting and reflecting EUV radiation generated by the source. The meniscus is machined from a single piece of silicon. The collector optic assembly further includes a heat exchanger that includes cooling channels through which flows a liquid coolant. The heat exchanger is fabricated from a plurality of machined silicon sections fused together by a glass frit bonding process. The meniscus is fused to a front side of the heat echanger by a glass frit bonding process. A liquid coolant inlet manifold and a liquid coolant outlet manifold are also each machined from a single silicon block and are mounted to a back side of the heat exchange.

Document Type

Patent

Patent Number

US 6,822,251

Application Serial Number

10/705,410

Issue Date

11-23-2004

Current Assignee

UCFRF

Assignee at Issuance

UCFRF

Allowance Date

7-14-2004

Filing Date

11-10-2003

Assignee at Filing

Agency: Northrop Grumman Corporation

Filing Type

Nonprovisional Application Record

Donated

yes

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