Abstract

A nozzle for a laser-plasma EUV radiation source that provides thermal isolation between the nozzle body and the target material flowing therethrough. A target delivery tube is provided that extends through the nozzle body. The delivery tube has an expansion aperture positioned behind an exit collimator of the nozzle body. The delivery tube is made of a low thermal conductivity material, such as stainless steel, and is in limited contact with the nozzle body so that heating of the nozzle body from the plasma does not heat the liquid target material being delivered through the delivery tube. The expansion aperture has a smaller diameter than the exit collimator.

Document Type

Patent

Patent Number

US 6,657,213 B2

Application Serial Number

09/848,677

Issue Date

12-2-2003

Current Assignee

UCFRF

Assignee at Issuance

Agency: Northrop Grumman Corporation

Allowance Date

7-2-2003

Filing Date

5-3-2001

Assignee at Filing

Agency: TRW Inc.

Filing Type

Nonprovisional Application Record

Donated

yes

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