Abstract

Novel micro electro mechanical systems (MEMS)-based sensors for use in ultra-high temperature environments are disclosed. The MEMS-based sensors are derived from a class of polymer-derived ceramics selected from the group consisting of SiCN, SiBCN and SiAlCN. The materials of construction are such that, the sensors are capable of accurate, real-time, on-line and in-situ monitoring, suppression of combustion oscillations and detailed measurements in operating structures that have temperatures of from about 1500.degree. K to about 2000.degree. K, extreme pressures/turbulence and harsh chemical off gases. When the novel sensors are mounted on a hot gas path wall, such as, at a combustor exit, there can be a continuous monitoring of pressure pulses/oscillations, wall shear stress, temperature and surface heat flux.

Document Type

Patent

Patent Number

US 7,338,202 B1

Application Serial Number

10/883,549

Issue Date

3-4-2008

Current Assignee

UCFRF

Assignee at Issuance

UCFRF

College

College of Engineering and Computer Science (CECS)

Department

Mechanical and Aerospace Engineering

Allowance Date

11-6-2007

Filing Date

7-1-2004

Assignee at Filing

UCFRF

Filing Type

Nonprovisional Application Record

Donated

no

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