Aggregation and filtration effects on the polishing performance of chemical mechanical polishing slurries

Keywords

Electrolytic polishing, Grinding and polishing

Notes

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Graduation Date

Spring 2001

Advisor

Desai, Vimal

Degree

Master of Science (M.S.)

College

College of Engineering and Computer Science

Department

Mechanical, Materials, and Aerospace Engineering

Degree Program

Materials Science and Engineering

Format

Print

Language

English

Length of Campus-only Access

None

Access Status

Masters Thesis (Open Access)

Subjects

Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic

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