Aggregation and filtration effects on the polishing performance of chemical mechanical polishing slurries
Electrolytic polishing, Grinding and polishing
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Master of Science (M.S.)
College of Engineering and Computer Science
Mechanical, Materials, and Aerospace Engineering
Materials Science and Engineering
Length of Campus-only Access
Masters Thesis (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Ewasiuk, Rhonda Jeanne, "Aggregation and filtration effects on the polishing performance of chemical mechanical polishing slurries" (2001). Retrospective Theses and Dissertations. 1171.