Chemical and mechanical analysis on CMP polyurethane pads
Grinding and polishing, Polyurethanes
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Master of Science (M.S.)
College of Arts and Sciences
Length of Campus-only Access
Masters Thesis (Open Access)
Arts and Sciences -- Dissertations, Academic; Dissertations, Academic -- Arts and Sciences
Lu, Huijun, "Chemical and mechanical analysis on CMP polyurethane pads" (2001). Retrospective Theses and Dissertations. 1264.