Wet etching studies on electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposited sin films
Plasma enhanced chemical vapor deposition, Semiconductors -- Etching, Silicon nitride
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Master of Science (M.S.)
College of Engineering
Electrical Engineering and Computer Science
Length of Campus-only Access
Masters Thesis (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Balachandran, Kartik, "Wet etching studies on electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposited sin films" (2000). Retrospective Theses and Dissertations. 1767.