Silicon-to-glass and silicon-to-silicon bonding
Semiconductors -- Bonding, Silicon on insulator technology
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Master of Science (M.S.)
College of Engineering
Electrical and Computer Engineering
Length of Campus-only Access
Masters Thesis (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Deshpande, Mamatha G., "Silicon-to-glass and silicon-to-silicon bonding" (1999). Retrospective Theses and Dissertations. 2102.