An investigation of reactive ion etching on quartz
Plasma etching, Semiconductors -- Etching
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Richie, Samuel M.
Master of Science (M.S.)
College of Engineering
Electrical and Computer Engineering
Length of Campus-only Access
Masters Thesis (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Venkatachalam, Karthik, "An investigation of reactive ion etching on quartz" (1999). Retrospective Theses and Dissertations. 2278.