Analysis and enhancement of reactive low voltage ion plating for thin film deposition
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Guenther, Karl H.
Master of Science (M.S.)
College of Engineering
Length of Campus-only Access
Masters Thesis (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Zarrabian, Sohrab, "Analysis and enhancement of reactive low voltage ion plating for thin film deposition" (1993). Retrospective Theses and Dissertations. 3779.