The objective of this study was to analyze theoretically and experimentally the fluid characteristics of forced flow in microchannels. An apparatus was designed and constructed to allow microflow through a 450 μm wide by 17. 5 μm deep microchannel in a silicon chip. The flow through the chip was laminar with Reynolds numbers not exceeding 100. Tuckerman and Pease (1981) theorized that microscopic heat exchangers etched in the back of silicon chips could provide for efficient heat removal from the chips at rates much higher than the conventional methods could attain. The best technologies available provided for heat removal rates of 20 w/cm2 whereas Tuckerman (1984) was able to attain rates in excess of 1000 w/cm2• The "proof of principle" in this study was to show that the flow through the microchannels obeyed the classical Navier-Stokes theory. It was found that flow through this channel was in agreement with the macroscopic fluid theory. Relationships between the mass flow rate of the fluid and the associated pressure drops were derived and used to analyze the data obtained. The laminar friction coefficient (C) (from f=C/Re0 , where c typically equals 16 for macroscopic laminar flow) of the system was determined and ranged from 19 to 25.1. Micro-cooling channels have the potential to enhance heat removal in silicon chips, thus enabling the chips to run cooler and faster than presently possible. Wagner (1992) used the experimental apparatus designed in this study to perform additional analysis.
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Master of Science (M.S.)
College of Engineering
Mechanical and Aerospace Engineering
Length of Campus-only Access
Masters Thesis (Open Access)
Dissertations, Academic -- Engineering; Engineering -- Dissertations, Academic
Ulseth, Ronald R., "Microchannel fluid flow in a silicon chip" (1992). Retrospective Theses and Dissertations. 4520.