Title
Infrared Properties (3-5 Μm) Of Ion Plated Thin Films
Abstract
Thin films deposited by standard electron beam evaporation have a columnar microstructure and consequential water adsorption which is not prevalent in fully dense ion plated optical coatings. In electron beam evaporated films the water becomes an intrinsic part of the film since the packing density is less than unity, and causes absorption at and around 3μm. In contrast, the absence of water in ion plated films makes a number of oxide coatings suitable for use in the first atmospheric window (3-5 μm). In this study, the spectral transmission curves of single layer and broadband multilayer coatings in the 4000-2000 cm-1 range show clearly that ion plated coatings do not contain any water, while electron beam evaporated thin films have strong absorption around 3400 cm-1. The refractive indices of several oxide, silicon nitride, and pure silicon films are shown to be consistently higher for ion plating than for electron beam evaporation, also indicating a higher packing density. © 1989, SPIE.
Publication Date
9-11-1989
Publication Title
Proceedings of SPIE - The International Society for Optical Engineering
Volume
1112
Number of Pages
417-423
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1117/12.960801
Copyright Status
Unknown
Socpus ID
0024946082 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/0024946082
STARS Citation
Guenther, K. H.; Sachdeva, P.; and Taubenfeld, Z., "Infrared Properties (3-5 Μm) Of Ion Plated Thin Films" (1989). Scopus Export 1980s. 375.
https://stars.library.ucf.edu/scopus1980/375