Title
Extreme Ultraviolet Polarizing Optics Using Bare And Aluminum-Coated Silicon Carbide
Abstract
A deformable three-reflection system that uses a bare silicon carbide substrate can function as an in-line, high-throughput (>30%), 90° phase shifter in the 50–100 nm spectral range. For a given extreme ultraviolet wavelength, an aluminum thin film can be deposited on the silicon carbide substrate to suppress the parallel (p) or perpendicular (s) polarization on single reflection or to introduce quarter-wave retardation and equal reflectances for incident p- and s-polarized light. © 1995 Optical Society of America.
Publication Date
1-1-1995
Publication Title
Applied Optics
Volume
34
Issue
28
Number of Pages
6438-6442
Document Type
Article
Personal Identifier
scopus
DOI Link
https://doi.org/10.1364/AO.34.006438
Copyright Status
Unknown
Socpus ID
77951703186 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/77951703186
STARS Citation
Azzam, R. M.A. and Kan’An, A. M., "Extreme Ultraviolet Polarizing Optics Using Bare And Aluminum-Coated Silicon Carbide" (1995). Scopus Export 1990s. 1755.
https://stars.library.ucf.edu/scopus1990/1755