Title

Extreme Ultraviolet Polarizing Optics Using Bare And Aluminum-Coated Silicon Carbide

Abstract

A deformable three-reflection system that uses a bare silicon carbide substrate can function as an in-line, high-throughput (>30%), 90° phase shifter in the 50–100 nm spectral range. For a given extreme ultraviolet wavelength, an aluminum thin film can be deposited on the silicon carbide substrate to suppress the parallel (p) or perpendicular (s) polarization on single reflection or to introduce quarter-wave retardation and equal reflectances for incident p- and s-polarized light. © 1995 Optical Society of America.

Publication Date

1-1-1995

Publication Title

Applied Optics

Volume

34

Issue

28

Number of Pages

6438-6442

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/AO.34.006438

Socpus ID

77951703186 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/77951703186

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