Title

Velocity Characterization Of Particulate Debris From Laser-Produced Plasmas Used For Extreme-Ultraviolet Lithography

Keywords

Extreme-ultraviolet lithography; Laser-produced plasmas; Plasma debris

Abstract

Debris from laser-produced plasmas created with solid Sn and Au targets has been characterized according to speed and particulate size. Conditions for the experiments were those appropriate for producing an optimum laser-produced plasma emission at 13.5 nm for use in extreme-ultraviolet lithography. Results in the form of histogram data show that the speed distribution of the debris particulates is quite varied and in general exhibits an upper limit of 640 m/s. In the case of Sn a peak in the velocity distribution is observed near 300 m/s. Small particulates, of the order of 1 μm or less, constitute the majority of the particulate emission in both materials. The implications for debris reduction based on the measurements are also discussed. © 1995 Optical Society of America.

Publication Date

1-1-1995

Publication Title

Applied Optics

Volume

34

Issue

28

Number of Pages

6513-6521

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/AO.34.006513

Socpus ID

0029393423 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0029393423

This document is currently not available here.

Share

COinS