Title

Effects Of Process Errors On The Diffraction Characteristics Of Binary Dielectric Gratings

Keywords

Diffraction–mathematical models; Diffractive optics; Optical fabrication

Abstract

The effects of fabrication errors on the predicted performance of surface-relief phase gratings are analyzed with a rigorous vector diffraction technique. For binary elements, errors in the dimensions of the profile [depth, linewidth (fill factor), and grating period], as well as errors in the shape of the profile, are investigated. It is shown that the dimension errors do not have a significant effect on grating performance when the grating is designed for either maximum or minimum diffraction efficiency. A trapezoid is used to model the shape error of the profile. For the first time, design rules that significantly reduce the effects of any shape error are presented. © 1995 Optical Society of America.

Publication Date

5-10-1995

Publication Title

Applied Optics

Volume

34

Issue

14

Number of Pages

2430-2435

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/AO.34.002430

Socpus ID

84975603531 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84975603531

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