Title

Zno/Diamond/Si Saw Filter Properties Including Velocity Dispersion

Abstract

The surface acoustic wave (SAW) filter properties of ZnO/diamond/Si structure are calculated including velocity dispersion. It is well known that the pole width of a SAW filter response and the number of electrodes have a reciprocal relation for bulk piezoelectric materials. However, the pole width of layered structures tends to be narrower than that of expected bulk SAW devices and the reason is due to the velocity dispersion of layered structures. The pole width of layered structures was calculated by the delta function model including the velocity dispersion and was compared with the experimental results. The dispersion effect is also calculated by using the Smith's equivalent circuit model. The results of this analysis are presented and agree well with the experimental results.

Publication Date

12-1-1995

Publication Title

Proceedings of the IEEE Ultrasonics Symposium

Volume

1

Number of Pages

371-374

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

0029459296 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0029459296

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