Title

Focused ion beam milling and micromanipulation lift-out for site specific cross-section TEM specimen preparation

Abstract

A site specific technique for cross-section transmission electron microscopy specimen preparation of difficult materials is presented. Focused ion beams are used to slice an electron transparent sliver of the specimen from a specific area of interest. Micromanipulation lift-out procedures are then used to transport the electron transparent specimen to a carbon coated copper grid for subsequent TEM analysis. The experimental procedures are described in detail and an example of the lift-out technique is presented.

Publication Date

1-1-1997

Publication Title

Materials Research Society Symposium - Proceedings

Volume

480

Number of Pages

19-27

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1557/proc-480-19

Socpus ID

0031335126 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0031335126

This document is currently not available here.

Share

COinS