Title

One-step microlithography

Keywords

Microlithography; Micromanufacturing; Miniaturization; Rapid machining

Abstract

Subject of this investigation is a one-step Rapid Machining Process to create miniaturized 3D parts, using the original sample material. An experimental setup where metal powder is fed to the laser beam-material interaction region has been built. The powder is melted and forms planar, two-dimensional geometries as the substrate is moved under the laser beam in XY-direction. After completing the geometry in the plane, the substrate is displaced in Z-direction, and a new layer of material is placed on top of the just completed deposit. By continuous repetition of this process, 3D parts were created. In particular, the impact of the focal spot size of the high power laser beam on the smallest achievable structures was investigated. At a translation speed of 51 mm/s a minimum material thickness of 590 \xm was achieved. Also, it was shown that a small Z-displacement has a negligible influence on the continuity of the material deposition over this power range. A high power CO2 laser was used as energy source, the material powder under investigation was Stainless Steel SS304L (particle size 140 (am). Helium was used as shield gas at a flow rate of 15 1/min. The incident CO2 laser beam power was varied between 300 W and 400 W, with the laser beam intensity distributed in a donut mode. The laser beam was focused to a focal diameter of 600 μm.

Publication Date

9-2-1997

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

3225

Number of Pages

119-125

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.284548

Socpus ID

13544254958 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/13544254958

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