Title

Synthesis and electron field emission of nanocrystalline diamond thin films grown from N2/CH4 microwave plasmas

Abstract

Nanocrystalline diamond films have been synthesized by microwave plasma enhanced chemical vapor deposition using N2/CH4 as the reactant gas without additional H2. The nanocrystalline diamond phase has been identified by x-ray diffraction and transmission electron microscopy analyses. High resolution secondary ion mass spectroscopy has been employed to measure incorporated nitrogen concentrations up to 8 ×1020 atoms/cm3. Electron field emission measurements give an onset field as low as 3.2 V/μm. The effect of the incorporated nitrogen on the field emission characteristics of the nanocrystalline films is discussed. © 1997 American Institute of Physics.

Publication Date

11-1-1997

Publication Title

Journal of Applied Physics

Volume

82

Issue

9

Number of Pages

4546-4550

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1063/1.366190

Socpus ID

4143080398 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/4143080398

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