Title

Bulk acoustic wave mode shaping using a transversely graded electrode

Abstract

This paper will present the basic principles of the transverse graded electrode (TGE) for the tailoring of BAW transverse modes. The theoretical basis and equations will be summarized and the stacked matrix theory for solutions of the mode profiles will be introduced for the BAW structures. The stacked matrix approach, well known from optics and electromagnetics, is powerful since it allows for easy solution of an arbitrary number of one dimensional waveguide sections. The results will assume an isotropic substrate in the transverse propagation directions for solutions of the number of modes, the mode profiles, the mode velocities, and mode coupling. Different theoretical mode profiles will be presented for various electrode weighting schemes.

Publication Date

12-1-1997

Publication Title

Proceedings of the Annual IEEE International Frequency Control Symposium

Number of Pages

743-749

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

0031332331 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0031332331

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