Title

Electrostatic discharge in semiconductor devices: an overview

Keywords

Electrical overstress; Electrostatic discharge; Empirical models; Failure mechanisms; Semiconductor devices

Abstract

Electrostatic discharge (ESD) is an event that sends current through an integrated circuit (1C). This paper reviews the impact of ESD on the 1C industry and details the four stages of an ESD event: 1) charge generation, 2) charge transfer, 3) device response, and 4) device failure. Topics reviewed are charge generation mechanisms, models for ESD charge transfer, electrical conduction mechanisms, and device damage mechanisms leading to circuit failure. © 1998 IEEE.

Publication Date

1-1-1998

Publication Title

Proceedings of the IEEE

Volume

86

Issue

2

Number of Pages

399-418

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/5.659493

Socpus ID

0032002444 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0032002444

This document is currently not available here.

Share

COinS