Title

SAW device modeling including velocity dispersion based on ZnO/Diamond/Si layered structures

Abstract

Surface acoustic wave (SAW) filter properties of ZnO/Diamond/Si structures are calculated including velocity dispersion. The conventional SAW device modeling has previously been developed for bulk substrates. However, layered materials exhibit SAW velocity dispersion. The null frequency band width of typical layered ZnO/Diamond/Si structures is narrower than that calculated by conventional SAW device modeling techniques due to the velocity dispersion of the layered structures. The null frequency band width of layered structures was calculated by the delta function model and the equivalent circuit model, including velocity dispersion, and compared with the experimental results. The dispersive equivalent circuit (DEC) model for layered structures is also presented. The results of these analysis are compared with the experimental results which show very good agreement. © 1998 IEEE.

Publication Date

12-1-1998

Publication Title

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volume

45

Issue

3

Number of Pages

660-666

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/58.677610

Socpus ID

0032074642 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0032074642

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