Title

Advances in the FIB lift-out technique for TEM specimen preparation: HREM lattice imaging

Abstract

The focused ion beam (FIB) lift-out technique has been modified to allow the preparation thin specimens suitable for high resolution transmission electron microscopy. The new technique in which the final FIB cut is performed on an angle to create a wedge shape in the lift-out specimen provides for a thin region so that lattice images may be obtained. Si {111} cross-fringes have been observed in a lift-out specimen that has been micromanipulated onto a carbon coated copper grid.

Publication Date

12-1-1998

Publication Title

Microstructural Science

Volume

26

Number of Pages

249-253

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

Socpus ID

0004796827 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0004796827

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