Title

A Review Of Focused Ion Beam Milling Techniques For Tem Specimen Preparation

Keywords

Focused ion beam; Scanning electron microscopy (SEM); Secondary ion mass spectrometry (SIMS); Transmission electron microscopy (TEM)

Abstract

The use of focused ion beam (FIB) milling for the preparation of transmission electron microscopy (TEM) specimens is described. The operation of the FIB instrument is discussed and the conventional and lift-out techniques for TEM specimen preparation and the advantages and disadvantages of each technique are detailed. The FIB instrument may be used for rapid site-specific preparation of both cross-section and plan view TEM specimens.

Publication Date

6-1-1999

Publication Title

Micron

Volume

30

Issue

3

Number of Pages

197-204

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/S0968-4328(99)00005-0

Socpus ID

0032970357 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0032970357

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