Title
Fabrication And Characterization Of Integrated Optical Waveguides In Sulfide Chalcogenide Glasses
Abstract
This paper reports on the fabrication process of As-S-(Se)-based chalcogenide glass optical waveguides using three techniques: photolithography, laser beam writing, and ion implantation. The fabrication method of the bulk sulfide glasses and the processing of integrated devices are described and assessed in light of the propagation characteristics and optical losses in each case.
Publication Date
7-1-1999
Publication Title
Journal of Lightwave Technology
Volume
17
Issue
7
Number of Pages
1184-1191
Document Type
Article
Personal Identifier
scopus
DOI Link
https://doi.org/10.1109/50.774252
Copyright Status
Unknown
Socpus ID
0032682606 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/0032682606
STARS Citation
Viens, Jean Francois; Meneghini, Chiara; and Villeneuve, Alain, "Fabrication And Characterization Of Integrated Optical Waveguides In Sulfide Chalcogenide Glasses" (1999). Scopus Export 1990s. 4137.
https://stars.library.ucf.edu/scopus1990/4137