Title
Fabrication Of Saw Three Phase Unidirectional Transducers Using Dielectric Crossovers
Keywords
Surface acoustic wave devices; Ultrasonics
Abstract
Two common dielectrics used for isolation in semiconductor device fabrication, spin on glass (SOG) and polyimide, are evaluated for the fabrication of dielectric supported crossover interconnections for surface acoustic wave (SAW) devices employing three-phase unidirectional transducers (TPUDTs). An all-aluminium reliable fabrication process was developed using polyimide. © 1993, The Institution of Electrical Engineers. All rights reserved.
Publication Date
4-29-1993
Publication Title
Electronics Letters
Volume
29
Issue
9
Number of Pages
801-802
Document Type
Article
Identifier
scopus
Personal Identifier
scopus
DOI Link
https://doi.org/10.1049/el:19930535
Copyright Status
Unknown
Socpus ID
0027585311 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/0027585311
STARS Citation
Garrity, M. E. and Richie, S. M., "Fabrication Of Saw Three Phase Unidirectional Transducers Using Dielectric Crossovers" (1993). Scopus Export 1990s. 549.
https://stars.library.ucf.edu/scopus1990/549