Title

Introduction To Special Issue Of Applied Optics On Soft-X-Ray Projection Lithography

Abstract

This special issue contains a collection of papers describing results that were presented at the Second Topical Meeting on Soft-X-Ray Projection Lithography sponsored by the Optical Society of America and held 6-8 April 1992 in Monterey, California, along with several additional papers submitted after that meeting. These papers are being published in this collection to make them readily available to a larger audience than would normally occur with a proceedings and also to take advantage of the critical review process. © 1993 Optical Society of America.

Publication Date

1-1-1993

Publication Title

Applied Optics

Volume

32

Issue

34

Number of Pages

6895-6896

Document Type

Article

Identifier

scopus

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/AO.32.006895

Socpus ID

18644362356 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/18644362356

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