Title

Investigation Of Distortion And Damage Of Molybdenum-Silicon Multilayer Reflective Coatings With High-Intensity Ultraviolet Radiation

Abstract

Studies are performed to determine an upper limit on the optical damage threshold of a soft-x-ray molybdenum-silicon multilayer reflective coating by the use of a 308-nm, 15-ns pulse from a Xe-Cl excimer laser in order to simulate the potential damage induced by the x-ray flux from a pulsed laser-produced plasma. Experimental results yield a value of 0.26 J/cm2 to produce visible signs of damage as determined by optical microscopy. Experiments are conducted first on silicon, as a reference point of a bulk material, and then applied to molybdenum-silicon in an effort to facilitate a theoretical comparison between a simple and a more complicated material. Theoretical predictions are in reasonable agreement with experimental results, but suggest that a lower value of 0.085 J/cm2 might cause significant thermal-induced damage. © 1993 Optical Society of America.

Publication Date

1-1-1993

Publication Title

Applied Optics

Volume

32

Issue

34

Number of Pages

6999-7006

Document Type

Article

Identifier

scopus

Personal Identifier

scopus

DOI Link

https://doi.org/10.1364/AO.32.006999

Socpus ID

0027883375 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0027883375

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