Title

Characterization And Optimization Of Cerium Dioxide Films Deposited By R.F. Magnetron Sputtering

Abstract

Cerium dioxide (CeO2) films were deposited on glass substrates by an r.f. magnetron sputtering process. The deposition rates were studied as a function of the molar fraction of oxygen in the system for various input power levels. The deposition conditions were optimized to obtain good quality films for optical transmission. © 1992.

Publication Date

12-10-1992

Publication Title

Thin Solid Films

Volume

221

Issue

1-2

Number of Pages

13-16

Document Type

Article

Identifier

scopus

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/0040-6090(92)90788-D

Socpus ID

0026971937 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0026971937

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