Title

Characteristics And Fabrication Of A Narrow Gap Transducer

Abstract

The fundamental characteristics of a narrow gap transducer have been investigated theoretically and experimentally. A SAW transducer with narrow gaps between electrodes, a Metallization ratio (denoted by a/p) of greater than 903!, has potential application to high frequency devices. Comparable to the split finger electrode transducer, the electrode reflections within the narrow gap transducer are negligibly small. A narrow gap transducer doubles the center frequency for a given line width as compared with a conventional transducer(a/p=50X). It relaxes the restriction on fabrication and lowers the resistance of the electrodes. The strong harmonics of the transducer can be also used for possible higher frequency application. The test devices are fabricated by a self aligned liftoff process without using anodization. The experiment shows no internal reflections and a strong series of harmonics. This paper presents theoretical and experimental results for the narrow gap devices under development.

Publication Date

1-1-1992

Publication Title

Proceedings - IEEE Ultrasonics Symposium

Volume

1992-October

Number of Pages

143-146

Document Type

Article; Proceedings Paper

Identifier

scopus

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/ULTSYM.1992.276048

Socpus ID

85067052022 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/85067052022

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