Title

Characterization Of Three Phase Unidirectional Transducers

Abstract

To characterize a three phase unidirectional transducer's (TPUDT) transmission and reflection properties, a PC-based analysis and mask structure layout program was developed and a study of TPUDT crossover fabrication was performed. The analysis program which resulted can be used to calculate the equivalent circuit model elements by charge superposition, the thin film loss, the matching and phasing elements, and the forward and reverse response of the transducer. The structure program is capable of generating balanced apodized transducers based on user-defined time impulse weighting data. Test devices were designed using a balanced apodized structure which only required two elements for phasing and matching. Also, a novel TPUDT reflector was produced using a single three-phase transducer with a single inductor. Typically an air gap is used to obtain the crossovers required for a TPUDT to assure the lowest parasitic capacitance. However, common dielectrics used for isolation in semiconductor fabrication, including spin on glass (SOG) and polyimide, were evaluated and a reliable fabrication process was developed.

Publication Date

1-1-1992

Publication Title

Proceedings - IEEE Ultrasonics Symposium

Volume

1992-October

Number of Pages

77-82

Document Type

Article; Proceedings Paper

Identifier

scopus

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/ULTSYM.1992.276060

Socpus ID

85066993529 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/85066993529

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