Title

On Chip Electrostatic Discharge Protection For Mems Gas Sensor System

Keywords

Electrostatic discharge (ESD); Gas sensor system on-a-chip (SoC); Microelectro mechanical systems (MEMS); Snapback; Thyristor

Abstract

An on-chip electrostatic discharge (ESD) protection scheme is demonstrated for an emerging technology of microelectro mechanical systems (MEMS)-based embedded sensor (ES) system-on-a-chip (SoC). The ESD protection scheme is implemented using ground-referenced multifinger thyristor-type devices optimized for 1) the input/output(I/O) protection, 2) the power supply clamp, and 3) the internal sensors' electrodes during the micromachining process. A multiply finger layout scheme was also developed to the ESD protection level under the constraint of chip size. The ESD protection design methodology was tested and verified at both the device and SoC levels, and its effectiveness and robustness have been illustrated. Experimental results showed that the SoC passed a 4.1 kV Human Body Model ESD stress with no latchup induced and a very low leakage current of 10 -10 A.

Publication Date

2-1-2008

Publication Title

Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices

Volume

14

Issue

1

Number of Pages

163-166

Document Type

Article

Personal Identifier

scopus

Socpus ID

84862062076 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/84862062076

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