Title

Design Of Axially Superresolving Phase Pupil Filter For High-Numerical Aperture Applications

Keywords

Diffractive optical element; Fabrication error; Superresolution; Vectorial diffraction

Abstract

The method of generalized projection was used to design a phase pupil filter that super-resolves the axial point-spread-function (PSF) by 29% while holding the side-lobe intensities at below 52% of the peak intensity in the non-paraxial regime. The resulting phase filter has a binary 0/π eleven-zone rotationally symmetric profile. Although the filter's performance is theoretically satisfactory, it can be greatly compromised by imperfections introduced during experimental implementation. Such imperfections include fabrication errors, surface quality variation, and optical misalignment. A model based on vectorial diffraction was used to simulate and analyze quantitatively the effect of these imperfections on the superresolved PSF.

Publication Date

3-31-2008

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

6883

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.761022

Socpus ID

41149092142 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/41149092142

This document is currently not available here.

Share

COinS