Title

Physics Of Insulating Specimen Preparation For Non-Charging Auger Electron Spectroscopy

Abstract

Auger electron spectroscopy (AES) has the capability of providing compositional information with excellent spatial resolution. However, charging is known to be a major obstacle to the characterization of insulating materials. This paper discusses a novel technique using focused ion beam (FIB) for the preparation of thin specimens to overcome charging during AES analysis of insulating materials. A double layer model (DLM) was applied to calculate the 'effective thickness' of a Nextel-720 fibre/alumina ceramic matrix composite (CMC) for successful AES analysis with no charging compared to a relatively thick CMC sample. Similarly, the thickness for 50 industrially important solid oxides was calculated using our predictive method for non-charging AES analysis.

Publication Date

12-7-2001

Publication Title

Journal of Physics D: Applied Physics

Volume

34

Issue

23

Number of Pages

3319-3326

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1088/0022-3727/34/23/301

Socpus ID

0035824831 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/0035824831

This document is currently not available here.

Share

COinS