Physics Of Insulating Specimen Preparation For Non-Charging Auger Electron Spectroscopy
Auger electron spectroscopy (AES) has the capability of providing compositional information with excellent spatial resolution. However, charging is known to be a major obstacle to the characterization of insulating materials. This paper discusses a novel technique using focused ion beam (FIB) for the preparation of thin specimens to overcome charging during AES analysis of insulating materials. A double layer model (DLM) was applied to calculate the 'effective thickness' of a Nextel-720 fibre/alumina ceramic matrix composite (CMC) for successful AES analysis with no charging compared to a relatively thick CMC sample. Similarly, the thickness for 50 industrially important solid oxides was calculated using our predictive method for non-charging AES analysis.
Journal of Physics D: Applied Physics
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Wannaparhun, S.; Seal, S.; and Scammon, K., "Physics Of Insulating Specimen Preparation For Non-Charging Auger Electron Spectroscopy" (2001). Scopus Export 2000s. 11.