Title

Effect Of Hydrogen On The Physical And Mechanical Properties Of Silicon Carbide-Derived Carbon Films

Keywords

Chlorination; Graphitization; Nanoindentation; Plasticity; Silicon carbide

Abstract

In this study, the effect of hydrogen on the structure and mechanical properties of carbon films produced by selective etching of monolithic SiC was examined. The process to produce carbon films from SiC (i.e., SiC-derived carbon, CDC) was carried out in a gas mixture of Cl2 and H2 at 1000 °C for 20 h. The Raman intensity ratio, ID/IG, where subscripts D and G refer to diamond and graphite, decreased as the hydrogen concentration in the gas mixture increased, indicating a decrease in the sp2 carbon cluster. XRD analysis also showed that the fraction of graphitization decreased as the hydrogen concentration increased. The addition of hydrogen that prevented the formation of graphite (sp2 bonding) also resulted in a reduction in the film thickness. The hardness and elastic modulus of the carbon films tended to decrease as the H2 content increased owing to the contribution from the C-H bond and the nano-size pore. © 2009 Elsevier B.V. All rights reserved.

Publication Date

12-25-2009

Publication Title

Surface and Coatings Technology

Volume

204

Issue

6-7

Number of Pages

1018-1021

Document Type

Article

Personal Identifier

scopus

DOI Link

https://doi.org/10.1016/j.surfcoat.2009.05.023

Socpus ID

71849102931 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/71849102931

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