Title
Microsensor On Single Zno Microwire
Keywords
Hydrogen sensors; Microwires; Vapour phase process; Zinc oxide
Abstract
For development of individual ZnO microwire in hydrogen sensors an environmentally benign synthesis process and fabrication route are required. Here we report a synthesis route for ZnO microwires using vapour phase process. Furthermore, our synthesis technique permits microwires to be transferred to other substrates. This offers the possibility of using focused ion beam instrument for handling. We fabricated a single microwire-based sensor and found ~ 4% sensitive hydrogen 200 ppm in the air at room temperature. © 2009 IEEE.
Publication Date
12-1-2009
Publication Title
Proceedings of the International Semiconductor Conference, CAS
Volume
1
Number of Pages
275-278
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1109/SMICND.2009.5336549
Copyright Status
Unknown
Socpus ID
77950177558 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/77950177558
STARS Citation
Chai, G.; Rusu, E.; Chow, L.; Stratan, G. I.; and Heinrich, H., "Microsensor On Single Zno Microwire" (2009). Scopus Export 2000s. 11435.
https://stars.library.ucf.edu/scopus2000/11435