Title

Transverse And Axial Beam Shaping In The Non-Paraxial Domain

Keywords

Diffractive optics; Laser beam shaping; Pupil filters; Superresolution; Vector diffraction theory

Abstract

The design of beam-shaping pupil filters most commonly employs the scalar theory of diffraction, which does not accurately describe the focal field distribution under high numerical aperture focusing. To account for the full vector character of the field, we have developed computational algorithms for designing phase-only pupil filters that incorporate the electromagnetic theory of diffraction. These algorithms use the method of generalized projects or particle swarm optimization to generate phase-filter solutions based on a targeted focal field irradiance distribution. Computational results are presented that demonstrate how these procedures can be used to design phase filters that reshape the transverse beam, or achieve axial super-resolution for a single focused spot. The methods can be applied in the design of beam-shaping and superresolving optics used for imaging, direct laser writing, and lithography. © 2009 SPIE.

Publication Date

11-18-2009

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

7430

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.827475

Socpus ID

70449394610 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/70449394610

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