Title

Integrating Optics And Micro-Fluidic Channels Using Femtosecond Laser Irradiation

Keywords

Chalcogenide glass; Femtosecond direct write laser processing; Micro-fluidics; Sensors; Waveguides

Abstract

The ability to integrate micro-channels for fluid transport with optical elements is attractive for the development of compact and portable chip-based sensors. Femtosecond Laser Direct Writing (FLDW) in transparent materials is a powerful tool for the fabrication of such integrated devices. We demonstrate the use of FLDW to fabricate coupled micro-fluidic channels and optical waveguides towards an integrated sensing device for molecular detection. Waveguides were directly written into the host material and channels were formed by modifying the molecular structure through FLDW followed by wet chemical etching. Multiple host materials including chalcogenide glasses for IR detection are discussed. © 2009 SPIE.

Publication Date

5-25-2009

Publication Title

Proceedings of SPIE - The International Society for Optical Engineering

Volume

7203

Number of Pages

-

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1117/12.815306

Socpus ID

65649099764 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/65649099764

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