Integrating Optics And Micro-Fluidic Channels Using Femtosecond Laser Irradiation
Chalcogenide glass; Femtosecond direct write laser processing; Micro-fluidics; Sensors; Waveguides
The ability to integrate micro-channels for fluid transport with optical elements is attractive for the development of compact and portable chip-based sensors. Femtosecond Laser Direct Writing (FLDW) in transparent materials is a powerful tool for the fabrication of such integrated devices. We demonstrate the use of FLDW to fabricate coupled micro-fluidic channels and optical waveguides towards an integrated sensing device for molecular detection. Waveguides were directly written into the host material and channels were formed by modifying the molecular structure through FLDW followed by wet chemical etching. Multiple host materials including chalcogenide glasses for IR detection are discussed. © 2009 SPIE.
Proceedings of SPIE - The International Society for Optical Engineering
Number of Pages
Article; Proceedings Paper
Source API URL
Anderson, T.; Hu, J.; Ramme, M.; Choi, J.; and Faris, C., "Integrating Optics And Micro-Fluidic Channels Using Femtosecond Laser Irradiation" (2009). Scopus Export 2000s. 12149.