Title
Progress On The Fabrication Of On-Chip, Integrated Chalcogenide Glass (Chg)-Based Sensors
Abstract
This paper reviews ongoing progress on the material design, fabrication and performance of high-Q chalcogenide glass resonators utilizing cavity-enhancement for high sensitivity MIR chemical sensing. These structures have been fabricated in thermally evaporated As- and Ge-based chalcogenide glass films with PDMS (polydimethylsiloxane) micro-fluidic channels using standard UV lithography. Discussed are findings that demonstrate that our novel chalcogenide-based micro-fluidic device can be used as highly sensitive refractive index sensors. © 2009 Optical Society of America.
Publication Date
1-1-2009
Publication Title
Optics InfoBase Conference Papers
Number of Pages
-
Document Type
Article; Proceedings Paper
Personal Identifier
scopus
DOI Link
https://doi.org/10.1364/aiom.2009.awb2
Copyright Status
Unknown
Socpus ID
85088183916 (Scopus)
Source API URL
https://api.elsevier.com/content/abstract/scopus_id/85088183916
STARS Citation
Petit, Laeticia; Carlie, Nathan; Zdyrko, Bodgan; Luzinov, Igor; and Richardson, Kathleen, "Progress On The Fabrication Of On-Chip, Integrated Chalcogenide Glass (Chg)-Based Sensors" (2009). Scopus Export 2000s. 12550.
https://stars.library.ucf.edu/scopus2000/12550