Title

Saw Ofc Strain Sensor

Keywords

Cantilever; OFC; SAW; Sensor; Strain

Abstract

This paper presents results for a 250MHZ orthogonal frequency coded (OFC) surface acoustic wave (SAW) cantilever device on YZ LiNbO3. A 1-D model is presented which predicts the variation in the wave velocity with applied strain. A FEM analysis is conducted which verifies the strain on the cantilever and supports the 1-D model predictions. Predicted results from the FEM model are presented and are in good agreement with the measured SAW OFC cantilever delay line results. Initial results on a diaphragm micro-ablated cavity are also presented. ©2009 IEEE.

Publication Date

1-1-2009

Publication Title

Proceedings - IEEE Ultrasonics Symposium

Number of Pages

2515-2518

Document Type

Article; Proceedings Paper

Personal Identifier

scopus

DOI Link

https://doi.org/10.1109/ULTSYM.2009.5441544

Socpus ID

77952859739 (Scopus)

Source API URL

https://api.elsevier.com/content/abstract/scopus_id/77952859739

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